HORIBA Auto SE Spectroscopic Ellipsometer for Simple Thin Film Measurement

HORIBA

Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

Specifications:

• Spectral range: 440-1000 nm

• Spot sizes: automatic selection 500x500 µm; 250x500 µm; 250x250 µm; 70x250 µm; 100x100 µm; 50x60 µm; 25x60 µm

• Detection: CCD – Resolution: 2nm

• sample stage: vacuum chucks, z height 40 mm

• Sample viewing: CCD camera - Field of view: 1.33x1 mm – Resolution: 10µm

• Goniometer: Fixed at 70° - Possible set up at 66° and 61.5°

• Numerous accessories

• Measurement time: <2s, typical 5s

• Accuracy:  NIST 100nm d ± 4Å, n(632.8nm) ± 0.002

• Repeatability:  NIST 15nm ± 0.2 Å