HORIBA

HORIBA 5104 5105 5202 Exhaust Pressure Controller

HORIBA5104 5105 5202Exhaust Pressure ControllerSpecifications:Model EC-510451055202Compatible sizeNW40NW5025 mm PTFE fitting1 inch PTFE fittingMaterials at gas contact areaSUS3

  • model:

HORIBA

5104    5105    5202

Exhaust Pressure Controller


Specifications:

Model                  EC-

5104

5105

5202

Compatible size

NW40

NW50

25 mm PTFE fitting

1 inch PTFE fitting

Materials at gas contact area

SUS316L, Fluoro rubber

PTFE, PEEK, Fluoro rubber

Conductance
(in vacuum area)

0.4 to 80L/s

0.6 to 200L/s

——

Outflow at 100 mm H2O
(fully closed)

20L/min

25L/min

3L/min


* This product is subject to Japan's Export Control Law (i.e. on its control list). Before it is exported from Japan to overseas or supplied to non-residents, an Export License must be obtained from the Ministry of Economy, Trade and Industry (METI) of Japan.


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