HORIBA EV 2.0 Series Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry-Tamasak (M) Sdn Bhd 京都玉崎马来亚西亚公司

HORIBA EV 2.0 Series Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

HORIBAEV 2.0 SeriesEndpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL InterferometrySpecifications:EV 2.0 SpectrometerSystem outlineThe small sized spectrometer is based

model：

HORIBA

EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

Specifications:

EV 2.0 Spectrometer

System outline	The small sized spectrometer is based on a concave holographic grating (aberration corrected) with 20mm focal length (LR) or 75 mm focal length (STD, HR) and 50µm slit. The spectrometer is attached to a window of the Tool chamber or through SMA fiber. 3 models of spectrometers: LR: Low resolution STD: Standard resolution HR: High resolution Other on requests
Grating	HORIBA Aberration corrected Concave grating
Detector	BT CCD Maker: Hamamatsu Photonics
Electronics	BT CCD Electronics Maker: HORIBA, Ltd. Model: JY70 16bit acquisition electronic Exposure time: 1 ms ～ 10 sec The following ports are installed 1. LAN Ethernet 100Mbps RJ45 (TCP/IP) 2. IOR 70 Remote Db25 PIO-RS 3. DC Power supply: 9 to 24V, Standard 24V
Spectrometer LR	Model: EV2.0 LR (Low Resolution) Wavelengths range 300nm～ 900 nm Focal length: 20mm Resolution: 6.5 nm Size (mm): 55,1 W X 133.5 X 139.6 H Weight (kg): 0.5 kg without cover (cover: + 0,15kg)
Spectrometer STD	Model: EV2.0 STD (Standard Resolution) Wavelengths range 200nm～ 1050 nm Focal length: 75mm Resolution 2.5 nm Size (mm): 110.3 W X 133.5 X 139.6 H Weight (kg): 1 kg without cover (cover: + 0,15kg)