HORIBA EV-140C Optical Emission Spectroscopy Etching End-point Monitor

Wavelength range

200 - 800 nm

Optical resolution

<2.0 nm @ =200 - 500 nm
<2.5 nm @ =500 - 700 nm
(FWHM theoretical resolution)

Optical design

Design

Aberration corrected Flat field concave grating

Focal length

140 mm

2nd order filter

Built-In

Detector

CCD type

Back thinned linear CCD image sensor

Pixel number

2048 × 64

A/D resolution

16 bit

Integration time

20 ms - 2.5 s (10 msec step)

Specification

Optical input

Optical fiber

Sensor unit dimensions

137 (W) × 156 (H) × 257 (D) mm
5.4 (W) × 6.1 (H) × 10.1 (D) in

Sensor unit mass

4.0 kg

Connecting chamber number

1 Ch

Power supply

24 V DC ± 10 %

Power consumption

12 VA (Max)

Operating temperature requirements

15 - 35 °C

Ambient temperature

0-50 °C (no condensation)

Operating moisture requirements

<80%RH at 25 °C (no condensation)

Front LCD display

Run status indicator (Sensor err /Controller err)

Cooling fan

DC fan

IN/OUT

◎ for Output signal with measurement curve link

Output port number

2 ch

Output range

0 - 5 V DC

◎ for PIO remote protocol

Digital output

PIO / (DI = 8 bit/ DO = 8 bit)

PIO remote protocol connector

Dsub25S
(PIO port, Analog output port)

Controller interface

Ethernet × 1 port