HORIBA HE-480R(W) Resistivity Meter for Semiconductor Cleaning Processes

Model

HE-480R

Measurement method

Electrode type (2-electrode method)

Cell constant

0.01 / cm

Temperature sensor
specifications

Platinum resistance 1000 Ω / 0 °C

Measuring range

Measurement unit

kΩ·m

0 to 2.00

0 to 20.0

0 to 200.0

0 to 1000 *

MΩ·cm

0 to 0.200

0 to 2.00

0 to 20.00

0 to 100.0 *

*: Measurable without temperature compensation

Temperature: 0 °C to 100 °C (Select your desired decimal point from 0, 1, and 2 digits.)

Repeatability Within

± 0.5 % of the full scale (in equivalent input)

Linearity Within

± 0.5 % of the full scale (in equivalent input)

Transmission
output

4 mA to 20 mA DC: input / output isolated type
Maximum load resistance: 900 Ω
Transmission output range: Freely selectable within the measurement range

Contact output

Outputs: 2 points
Alarm contact output (R1 and R2)
Contact type: relay contact, SPDT (1c)
Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load)
Contact function: selectable from upper / lower limit operation (ON / OFF control), alarm, and maintenance.

Transmission
output hold feature

• Previous value hold

• Optional value hold

• Continuous

Selectable from the above (However, only the previous value hold is available in the maintenance Mode.)

Self-diagnosis
function

• Sensor diagnosis

• Out of the measurement range

• A/D converter scale over

• Converter error

Temperature
compensation

• Based on the temperature characteristics of extra deionized water (reference temperature: 25 °C)

• Based on the reference temperature and user-defined temperature coefficient (reference temperature: 5 °C to 95 °C)

• No temperature compensation

Temperature - compensated range

0 °C to 100 °C

Power supply

Rated voltage 100 V to 240 V AC, 50 / 60 Hz, 10 VA (max.)

Structure

Indoor-use panel installation type
Panel: IP65 dust and water proof structure

Protective structure

Panel: IP65 (IEC60529, JIS C0920)

Conforming standards

CE Marking
FCC Rule

External
dimensions

48 (W) mm x 96 (H) mm x 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)

Mass

Approx. 400 g

Compatible
sensors

ERF-series, cell constant 0.01 / cm