HORIBA
HE-960H-TM-S
High Precision TMAH Concentration Monitor
Specifications:
Model name | HE-960H-TM-S |
Target of measurement | TMAH |
Measurement range | Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm |
Repeatability | Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity) |
Linearity | Within +/- 0.003wt% (Using equivalent input for conductivity) |
Transmission output | Number of output: 4 |
Contact output | Outputs: 5 points |
Communication output | RS-485 |
Power supply | 24V DC +/- 10% 10W |
Compatible sensor | FES-510 Series |
Wetted material of sensor | GC, PFA, Karletz® |