HORIBA LabRAM Odyssey Semiconductor Photoluminescence and Raman Wafer Imaging

Optical microscope

Open space microscope with white light reflection illumination, camera, 5×, 10×, 100× objectives as standard. Optional motorized objective turret.

Spectral range

Standard 200 nm - 2200 nm from sample to detector (achromatic, no change of optics required).

Imaging spectrometer

• Focal length: 800 mm.

• Spectral resolution FWHM at 532 nm excitation wavelength ≤ 0.6 cm^-1 with 1800 gr/mm and ≤ 0.3 cm^-1 with 3000 gr/mm.

• Spectral stability RMS: < 0.02 cm^-1 RMS Measured on Si 520 cm^-1 line.

• Equipped with Open Electrode CCD (standard), optional EMCCD, optional InGaAs arrays detector (max. 3 detectors).

Spatial resolution

XY lateral resolution < 0.5 µm; Z axial resolution < 1.5 µm.

300 mm × 300 mm motorized stage

XY high precision encoded motorized stage (X = 300 mm, Y = 300mm) with repeatability ≤1 µm; accuracy = 1 µm; resolution (encoder) = 50 nm; minimum motor step size = 10 nm.
Z specifications: resolution (minimum step size) = 0.01 µm.
Holders for 4" (100 mm), 6" (150 mm), 8" (200 mm) and 12" (300 mm) size wafers available. Vacuum compatible wafer holders.

Lasers

User selectable: 266 nm, 325 nm, 355 nm, 405 nm, 458 nm, 473 nm, 532 nm, 633 nm, 660 nm, 785 nm, & 1064 nm. Up to 6 motorized.

DuoScan™

DuoScan™ technology for fast Laser scanning and Macrospot imaging (typical macrospot dimensions 30 µm × 30 µm with 50× objective).