HORIBA LSC Compact Baking System
HORIBALSCCompact Baking SystemSpecifications:Flow rate generatedH2O 2SLM, TEOS 600 SCCM (Max.)Operating pressureMax. 1.33kPaSource tank volume2.7LHeat regulation methodPID control by the heat regulato
- model：
HORIBA
LSC
Compact Baking System
Specifications:
Flow rate generated | H2O 2SLM, TEOS 600 SCCM (Max.) |
Operating pressure | Max. 1.33kPa |
Source tank volume | 2.7L |
Heat regulation method | PID control by the heat regulator |
Liquid surface detection method | Floating switch |
Internal mass flow controller | SEC-8400 series |
Air pressure valve | Bellows type |
Materials in liquid connection and gas contact area | SUS316L, PFA |
Operating Temperature | 20 to 35°C |
External input | Air pressure valve open/close, mass flow controller flow rate setting signal (0 to 5 V DC/0 to 100% F.S.), emergency stop signal, auto zero signal (option) |
External output | Temperature alarm, liquid level H.H. alarm, liquid level signal (H, M, L), READY signal, mass flow controller flow rate output signal ((0 to 5 V DC/0 to 100% F.S.), thermoregulated bath internal fan stop alarm, valve voltage monitor (option) |