HORIBA LU-A1000 Liquid Auto Refill System
HORIBALU-A1000Liquid Auto Refill SystemSpecifications:ModelLU-A1000 seriesLiquids supportedTEOS, TMOB, TMOP, TEOP, BTBASSupply methodPressure movement from He gasGas supply pressureFor pressure moveme
- model：
HORIBA
LU-A1000
Liquid Auto Refill System
Specifications:
Model | LU-A1000 series |
Liquids supported | TEOS, TMOB, TMOP, TEOP, BTBAS |
Supply method | Pressure movement from He gas |
Gas supply pressure | For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N2 0.6 to 0.7 MPa (G) |
Tank | Maximum 5-gallon container can be attached (outside of production range) |
Operation | Automatic supply/stop using external signal from supply system |
Operation area display details | Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc. |
Gas connection | Refer to basic flow |
Power source | AC 100 to 240 V, 50/60 Hz, 300 VA |
Electricity connection | AC 100 to 240 V breaker connection, signal receptacle |
External dimensions | See external dimensions diagram |