HORIBA MV-2000 Mixed Injection System Liquid Vaporizer

Liquid Material

All liquids except those corrosive to stainless steel(ex. HCl, HF)

Setting Temperature

By vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C)

Leak Integrity

≤ 1 × 10-8 Pa·m3 /s (He)

Internal leak standard

≤ 1 × 10-6 Pa·m3 /s (He)

Wetted parts

SUS316L , PFA

Temperature Sensor

Thermocouple type K (CA)

Pressure Resistance

1MPa (G)

Standard Fitting

Liquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male

Operating Temperature

15 - 50 ˚C

Option

Air valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) )