HORIBAPD10Reticle / Mask Particle Detection SystemSpecifications:ModelPD10Dimensions(W) x (D) x (H)1,000 x 1,850 x 1,600 mmWeightApprox. 950kgInspection Particle SizePattern0.5 μm / 0.35 μm (0.1 μm :
HORIBA
PD10
Reticle / Mask Particle Detection System
Specifications:
Model | PD10 | |
Dimensions | (W) x (D) x (H) | 1,000 x 1,850 x 1,600 mm |
Weight | Approx. 950kg | |
Inspection Particle Size | Pattern | 0.5 μm / 0.35 μm (0.1 μm : Blank Mask)*¹ |
Glass | 5.0 μm (0.5 μm - : High Sensitivity Option)*¹ | |
Pellicle | 10.0 μm (0.5 μm - : High Sensitivity Option)*¹ | |
Light Source | 633 nm He-Ne laser or 488 nm Solid-state laser | |
Reticle Size | 5 inch - 9 inch | |
Case openers | SMIF POD, Compatible with various cases | |
Throughput | Approx. 12 min (From inspection start to test result display for 2 surface (6 inch) inspection) | |
Panel Surface Treatment | Stainless Steel | |
Installation Environment | Cleanliness | Class6 ISO standards or better |
Temperature | 23 +/- 1°C | |
Utilities | Power | AC200-240 V, 2 kVA 50/60Hz, Single Phase |
Vacuum Source | Pressure -80 kPA or less | |