HORIBA

HORIBA PV-1000 PV-2000 Piezo Actuator Valve

HORIBAPV-1000PV-2000Piezo Actuator ValveSpecifications:Flow Range1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)Flow Control Range2 -100% F.S.Valve Typenormally open /

  • model:

HORIBA

PV-1000

PV-2000

Piezo Actuator Valve


Specifications:


Flow Range

1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)

Flow Control Range

2 -100% F.S.

Valve Type

normally open / close

Input Signal

0 - 5VDC

Responce

less than 0.5 sec.

Operating Temperature

0 - 50 °C

Operating Diffential Pressure

MAX. 300 kPa(a)(max,42psi)

Pressure Resistance

1MPa

Leak Integrity

5×10-12Pa•m3(He)

scrollable


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