HORIBA RP-1 Reticle/Mask Particle Remover
HORIBARP-1Reticle/Mask Particle RemoverSpecifications:Applicable caseNikon/Canon/SMIF POD/HORIBAThroughputSimultaneously blows the glass and pellicle surfaces to remove particles approximately for 1 m
- model：
HORIBA
RP-1
Reticle/Mask Particle Remover
Specifications:
Applicable case | Nikon/Canon/SMIF POD/HORIBA |
Throughput | Simultaneously blows the glass and pellicle surfaces to remove particles approximately for 1 min. |
Dimensions | 1190(D) x 1150(W) x 1520(H)mm |