HORIBA

HORIBA RU-1000 Plasma Emission Controller

HORIBARU-1000Plasma Emission ControllerSpecifications:Input signalEthernet(10BASE-T,100BASE-TX) 1CHThe monitor signal of PMT, or the monitor signal of the power supplyfor sputtering (0-10Vdc/0-100%) 4

  • model:

HORIBA

RU-1000

Plasma Emission Controller


Specifications:

Input signal

Ethernet(10BASE-T,100BASE-TX) 1CH
The monitor signal of PMT, or the monitor signal of the power supply
for sputtering (0-10Vdc/0-100%) 4CH
MFC output signal (0-5Vdc/0-100%) 4CH

Output signal

PMT Gain setting signal (0-5Vdc/0-100%) 4CH
MFC setting signal (0-5Vdc/0-100%) 4CH

Power supply

AC100240V±10% 50/60Hz 100VA

Weight

Approx. 5.3kg

scrollable


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