HORIBA SLIA-300 Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

Measurement method

Molybdic blue absorptiometry

Measurement range

0 to 2 / 0 to 20 µg/L, or 0 to 5 / 0 to 50 µg/L (please specify when placing an order)

Measurement time

5 minutes

Measurement points

1 to 6 points (please specify when placing an order)

Reproducibility

±2% of full scale

Calibration function

Standard fluid calibration

Compensation function

Blank compensation
Metage line compensation (Specific to each line)

Reagent used

· Reagent A: sulfuric acid + ammonium molybdate
· Reagent B: oxalic acid
· Reagent C: L (+) - ascorbic acid

Reagent replacement interval

One week (according to the recommended period of our company)

Power

100 to 240 V AC 50/60 Hz

Max. power consumption

Approx. 600 VA

Installation condition

Indoor, Ambient temperature 10 to 35°C, Humidity 85% or lower

Sample water condition

· Water temperature: 15 to 35°C
· Supplied flow rate: 250 to 300 mL/min (must be adjustable)
· Pressure: 0.1 to 0.5 MPa

Outside dimensions

580 (W) x 375 (H) x 500 (D) mm

Weight

One-point measurement: approx. 41 kg (plus 1 kg for an additional measurement point)