HORIBA

HORIBA Smart SE Powerful and Cost Effective Spectroscopic Ellipsometer

HORIBASmart SEPowerful and Cost Effective Spectroscopic EllipsometerSpecifications:Standard ConfigurationsSpectra range:450nm to 1000nmSpectra resolutionBetter than 3nmLight sourceCombined Halogen and

  • model:

HORIBA

Smart SE

Powerful and Cost Effective Spectroscopic Ellipsometer


Specifications:

Standard Configurations

Spectra range:

450nm to 1000nm

Spectra resolution

Better than 3nm

Light source

Combined Halogen and Blue LED

Measurement time

<1sec to 10 sec

Beam size

75µm * 150µm, 100µm * 250µm,

100µm * 500µm, 150µm * 150µm,

250µm * 250µm, 250µm * 500µm,

500µm*500µm

Angle of incidence

450 to 900 by step of 50

Sample size

Up to 200mm

Sample alignment

Manual 17mm height adjustement and tilt

Dimensions

100cm * 46cm * 23cm(W*H*D)

scrollable

Performances

Straight-through air accuracy

Ψ=450±0.050 Δ=00±0.20

Thickness accuracy on 1000 Å Oxide

0.04%

Thickness repeatability on 1000 Å Oxide

±0.02%


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