HORIBA UV Plasma sources
HORIBAUV Plasma sourcesSpecifications:ModelUVS 10/35UVS300TypePlasma sourceDuo plasmatron sourceSupported gasesHe – H - Ne – Ar – Kr - XeHe – H – Ne - ArPower200 W300 WVacuum flangeDN40CFDN40CFCooling
- model：
HORIBA
UV Plasma sources
Specifications:
Model | UVS 10/35 | UVS300 |
Type | Plasma source | Duo plasmatron source |
Supported gases | He – H - Ne – Ar – Kr - Xe | He – H – Ne - Ar |
Power | 200 W | 300 W |
Vacuum flange | DN40CF | DN40CF |
Cooling | Air cooled | Water cooled |
Source point diameter | few mm | 50 µm |
Flux | 8.1015 photons/sr.s | 2.1016 photons/sr.s |
Overall length | 245 mm | 305 mm |
Weight | 3 kg | 12 kg |
Power supply | Included in the package | Included in the package |