HORIBA UVISEL Plus Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

HORIBA

UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

Specifications:

UVISEL Specifications

• Spectral range: from 190 to 885 nm │NIR extension option up to 2100 nm

• Detection: High resolution monochromator coupled to sensitive detectors

Manual Configuration

• Spot size: 0.05 – 0.1 – 1 mm (pinhole)

• Sample stage: 150 mm, manual height (20mm) and tilt adjustment

• Goniometer: Manually adjustable angle from 55° to 90° by step of 5°

Automatic Configuration

• Automation sample stage: 200x200mm, 300x300 mm XY sample stage, manual height (4mm) and tilt adjustment, XYZ sample stage, theta stage

• Automatic goniometer: Automatically adjustable angle from 45° to 90° by step of 0.01°

Integrated Goniometer

• Manual angle of incidence: 35° to 90° by 5° step

• Sample holder: 150mm, 20mm manual z height adjustment

• Autocollimation system for sample alignment in option

• Dimension: width: 25cm; height: 35cm; depth: 21 cm

In situ configuration

• Mechanical adaptation: CF35 or KF40 flanges

• Easy swith between in-situ and ex-situ configurations

• More information

Options

• Accessories: temperature controlled cell, liquid cell, electrochemical cell, reflectometry module to measure reflectance at 0° incidence, and more

• Vision: CCD camera

• More information

Performance

• Accuracy: Ψ= 45°±0.01° and Δ=0°±0.01° measured in straight-through air configuration1.5 – 5.3 eV

• Repeatability: NIST 1000Å SiO2/Si (190-2100 nm): d ± 0.1 % – n(632.8nm) ± 0.0001