HORIBA VC-1420 Direct Liquid Injection System

Flow rate generated^*1 (During TEOS generation)

Max. 5.0 CCM conversion (liquid phase conversion)

Liquids supported

TEOS, P(OCH3)3, C6F6

Temperature rise

Max. 150°C

Pressure generated^*1

Reduced pressure

External leak integrity

1.0x10-8Pa·m3/s

Internal Leak Integrity

1.0x10-6Pa·m3/s

Wetted mateliar

316L Stainless Steel ( polished surface )

Internal heater volume

AC 100V to 120V 70W(35Wx2)

Temperature sensor used

Thermocouple K type (CA)

Pressure Resistance

1.0MPa（G）

Standard Fitting

Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female

*1 Varies depending on the type of liquid.

*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa).