HORIBA VG-200S Capacitance Manometer

F.S. measurement range

133.32 Pa (A)

1.3332kPa (A), 13.332kPa (A), 133.32kPa (A)

133.32Pa (A)

1.3332kPa (A), 13.332kPa (A), 133.32kPa (A)

Sensor temperature *1

Amb. (25°C)

55℃ / 100°C

Accuracy *2

0.5% R.S.

0.25% R.S.

0.5% R.S.

0.25% R.S.

Resolution

0.03% F.S.

0.01% F.S.

0.03% F.S.

0.01% F.S.

Zero temperature coefficient

0.01% F.S./°C

0.005% F.S./°C

0.005% F.S. /°C

0.0025% F.S. /°C

Span temperature coefficient

0.05% R.S./°C

0.03% R.S./°C

0.03% R.S. /°C

0.02% R.S. /°C

Response time

< 60msec

Operating temperatue *3

10-50°C

Wetted materials

SUS316L

Pressurization limit

300kPA (A)

350kPa (A)

300kPa (A)

350kPa (A)

Output signal

0-10VDC Load resistance: 10kΩ or more

I/O connector

D-Sub 15pin

Power supply voltage

+15VDC±5％、0.1A max. -15VDC±5％、0.1A max

+15VDC±5%, 0.6Amax. -15VDC±5%, 0.6Amax.

24VDC±5%, 2.4W max.

24VDC±5%, 22W max.

warm-up time

15 minutes

60 minutes (55°C temp. control type)
120 minutes (100°C temp. control type)

Open collector output

Rated voltage: 30V Rated current: 50mA

Re-Zero input *4

Now-voltage contact input Contact open voltage: 13V Maximum contact current: 1.3mA