USHIO UX-3, UX-1 UX-4 UX-5 UX-7 UFX Large field stepper UX-5 Series UX-7 Series

USHIOUX-3, UX-1 UX-4 UX-5 UX-7 UFXLarge field stepper UX-5 Series UX-7 Series Specifications:ModelUX7-Square70Exposure area□70 mmPanel Size～□530　mmMask size6 inchesResolution2μm L/SExposure Waveleng

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USHIO

UX-3, UX-1 UX-4 UX-5 UX-7 UFX

Large field stepper UX-5 Series UX-7 Series

Specifications:

Model	UX7-Square70
Exposure area	□70 mm
Panel Size	～□530　mm
Mask size	6 inches
Resolution	2μm L/S
Exposure Wavelength	i Line