USHIO

USHIO UFX-2894 UFX-2477 UFX-2468 Roll to roll lithography tool UFX Series

USHIOUFX-2894 UFX-2477 UFX-2468Roll to roll lithography tool UFX Series Specifications:ModelUFX-2894UFX-2477UFX-2468Exposure area□250 mm□140mmTape width~250 mm~160mmResolution5 µm L/S4 µ

  • model:

USHIO

UFX-2894      UFX-2477      UFX-2468

Roll to roll lithography tool UFX Series


Specifications:

Model

UFX-2894

UFX-2477

UFX-2468

Exposure area

□250 mm

□140mm

Tape width

250 mm

160mm

Resolution

5 µm L/S

4 µm L/S

7 µm L/S

Exposure Wavelength

i line

i line

i line


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