USHIO Full field projection aligner UX-4
USHIOFull field projection aligner UX-4 Specifications:Exposure Method : Batch Projection Storage LightWafer/Panel ize/Tape: 4, 6 and 8-inch wafersResolution: 2umL/S~
- model：
USHIO
Full field projection aligner UX-4
Specifications:
Exposure Method : Batch Projection Storage Light
Wafer/Panel ize/Tape: 4, 6 and 8-inch wafers
Resolution: 2umL/S~