USHIO H120 H208 UV photo resist curing device "Unihard"

USHIOH120 H208 UV photo resist curing device "Unihard" Specifications:H120 series12-inch dedicated machine. Adopt EFEM equipped with a SEMI-compliant load port. Compliant with GEM300.H208 s

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USHIO

H120 H208

UV photo resist curing device "Unihard"

Specifications:

H120 series	12-inch dedicated machine. Adopt EFEM equipped with a SEMI-compliant load port. Compliant with GEM300.
H208 series	8-inch and 6-inch compatible machines