USHIO

USHIO H120 H208 Charge-elacing device

USHIOH120 H208 Charge-elacing device Specifications:H120 series12-inch dedicated machine. Adopt EFEM equipped with a SEMI-compliant load port. Compliant with GEM300.H208 series8-inch and 6-inch compa

  • model:

USHIO

H120 H208

Charge-elacing device


Specifications:

H120 series

12-inch dedicated machine. Adopt EFEM equipped with a SEMI-compliant load port. Compliant with GEM300.

H208 series

8-inch and 6-inch compatible machines


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