KEYENCEVHX-S650EFree-angle observation system （XYZ electric stage)Specifications:ModelVHX-S650EXYθ stageXY stage: Electric/ManualElectricXY-stage moving range±20 mmθ rotation angle±90°XYθ stage sizeTo
KEYENCE
VHX-S650E
Free-angle observation system （XYZ electric stage)
Specifications:
Model | VHX-S650E | |
XYθ stage | XY stage: Electric/Manual | Electric |
XY-stage moving range | ±20 mm | |
θ rotation angle | ±90° | |
XYθ stage size | Top surface: 171 × 168 mm (Centre disc: ø100) | |
Transmitted illumination-compatible magnification | 20 × or higher | |
Z stage | Z stage: Electric/Manual | Electric |
Z-motorised stage motor | 5-phase stepping motor | |
Z-motorised stage travel speed | 17 mm/sec (max.) | |
Z-stage moving range | 49 mm | |
Load capacity | 5 kg | |
XYθ stage | XY-motorised stage motor | 2-phase stepping motor |
XY-motorised stage resolution | 1 µm (typ.) | |
XY-motorised stage movement speed | 10 mm/sec (max.) | |
Z stage | Z-motorised stage resolution | 0.1 µm (typ.) |
Power supply | Power voltage | 100 to 240 VAC, 50/60 Hz |
Power consumption | 60 VA | |
Environmental resistance | Ambient temperature | +5 to 40 °C |
Relative humidity | 35 to 80 % RH (No condensation) | |