KEYENCEVHX-S660ELarge scale free-angle observation system （XYZ electric stage)Specifications:ModelVHX-S660EXYθ stageXY stage: Electric/ManualElectricXY-stage moving range±50 mmXYθ stage sizeTop surfac
KEYENCE
VHX-S660E
Large scale free-angle observation system （XYZ electric stage)
Specifications:
Model | VHX-S660E | |
XYθ stage | XY stage: Electric/Manual | Electric |
XY-stage moving range | ±50 mm | |
XYθ stage size | Top surface: 233 × 185 mm (Centre disc: ø168) | |
Transmitted illumination-compatible magnification | 20 × or higher | |
Z stage | Z stage: Electric/Manual | Electric |
Z-motorised stage motor | 5-phase stepping motor | |
Z-motorised stage travel speed | 17 mm/sec (max.) | |
Z-stage moving range | 49 mm | |
Load capacity | 5 kg | |
XYθ stage | XY-motorised stage motor | 2-phase stepping motor |
XY-motorised stage resolution | 1 µm (typ.) | |
XY-motorised stage movement speed | 20 mm/sec (max.) | |
Z stage | Z-motorised stage resolution | 0.1 µm (typ.) |
Power supply | Power voltage | 100 to 240 VAC, 50/60 Hz |
Power consumption | 60 VA | |
Environmental resistance | Ambient temperature | +5 to 40 °C |
Relative humidity | 35 to 80 % RH (No condensation) | |
Weight | Approx. 20 kg | |