Model | IM-8010 |
Type | Head |
Image sensor | 1" 20 megapixel monochrome CMOS |
Display | 12.1" LCD monitor (WXGA: 1280 x 800) |
Receiver lens | Double telecentric lens |
Image measurement | Field of view | Wide-field measurement mode | 200 mm × 200 mm (quadangle R50) |
High-precision measurement mode | 125 mm×125 mm |
Minimum display unit | 0.1 µm |
Repeatability | Wide-field measurement mode | Without stage movement | ±1 µm |
With stage movement | ±2 µm |
High-precision measurement mode | Without stage movement | ±0.5 µm |
With stage movement | ±1.5 µm |
Measurement accuracy (±2σ) | Wide-field measurement mode | Without binding | ±3.9 µm*1 |
With binding | ±(7+0.02L) µm*2 |
High-precision measurement mode | Without binding | ±2µm*3 |
With binding | ±(4+0.02L) µm*4 |
Outer diameter measurement | Measurement accuracy | Wide-field measurement mode | ±(2.8+0.02D) µm*5 |
High-precision measurement mode | ±(1.4+0.04D) µm*6 |
External remote input | Non-voltage input (contact/solid-state) |
External output | OK/NG/FAIL/MEAS. | PhotoMOS output Rated load: 24 VDC, 0.5 A ON resistance: 50 mΩ or less |
External illumination control | Intensity control | PWM control 100 kHz |
Output voltage | DC12V |
Output current | 1.6 A (max.) |
Interface | LAN | RJ-45 (10BASE-T/100BASE-TX/1000BASE-T) |
USB 3.1 | 4 ports (Rear: 4) |
USB 2.0 series A | 4 ports (Front: 2, Rear: 2) |
Monitor output | DVI-D |
Record | Hard disk drive | 500 GB |
Illumination system | Transparent | Telecentric transmissive illumination |
Ring | Four division multi-angle illumination (motorized) Slit ring (directional) illumination (motorized) |
XY stage | Moving range | 100 mm × 100 mm (motorized) |
Withstand load | 5 kg |
Z stage | Moving range | 75 mm (motorized) |
Power supply | Power voltage | 100 to 240 V ±10% 50/60Hz |
Power consumption | 430 VA max. |
Environmental resistance | Ambient temperature | +10 to 35°C*7 |
Relative humidity | 20 to 80% RH (no condensation) |
Overvoltage category | II |
Pollution degree | 2 |
Weight | Approx. 30 kg |
*1 In the range of ø80 mm and the operating ambient temperature range of +23 ± 1°C at the focused focal point position *2 In the range of 180 mm × 180 mm (quadangle R40), when the operating ambient temperature range of +23±1°C at the focused focal point position, and when the loading weight on the stage is 2 kg or less. L is a stage movement (mm). *3 In the range of ø20 mm and the operating ambient temperature range of +23 ± 1°C at the focused focal point position. *4 In the range of 120 mm × 120 mm, when the operating ambient temperature range of +23±1°C at the focused focal point position, and when the loading weight on the stage is 2 kg or less. L is a stage movement (mm). *5 Range of L118 mm × ø60 mm. When the target is placed on the center of the lens field of view at the focal point and the target axis direction is facing the horizontal lens field of view. When the operating ambient temperature range is +23 ± 1°C and D is the Y direction distance (mm). *6 Range of L106 mm × ø20 mm. When the target is placed on the center of the lens field of view at the focal point and the target axis direction is facing the horizontal lens field of view. When the operating ambient temperature range is +23 ± 1°C and D is the Y direction distance (mm). *7 +15 to 35 when the XY stage speed is 80 mm/s. |