KEYENCE LM-X100L Head Multi-colour laser model

Type

Head

Image sensor

1", 20-megapixel monochrome CMOS

Receiver lens

Double telecentric lens

Image measurement

Field of view

Wide-field measurement mode

325 mm × 175 mm

High-precision measurement mode

306 mm × 156 mm

Minimum display unit

0.1 μm

Repeatability

Inside camera's field of view (2σ)

Wide-field measurement mode

±0.5 μm

High-precision measurement mode

±0.1 μm

With stage movement

X/Y axis (E1)

±0.9 μm

X/Y plane (E2)

Measurement accuracy

Inside camera's field of view (2σ)

Wide-field measurement mode

±2 μm ^*1

High-precision measurement mode

±0.7 μm ^*2

With stage movement

X/Y axis (E1)

±(1.8 + 0.02 L) μm ^*3

X/Y plane (E2)

±(2.8 + 0.02 L) μm ^*3

AF height measurement

Repeatability

±2 μm

Measurement accuracy (EUZ,MPE)

±(4.8 + 0.04 L) μm ^*4

Laser height measurement

Measurable range (X/Y)

239 mm × 146 mm

Minimum display unit

0.1 μm

Repeatability

±0.6 μm ^*5

Measurement accuracy (EUZ,MPE)

±(4.8 + 0.04 L) μm ^*4

Spot diameter

ø50 μm

Laser class

Class 1

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS.

PhotoMOS output
Rated load: 24 VDC, 0.5 A
ON resistance: 50 mΩ or lower

Illumination system

Transparent

Telecentric transparent green LED illumination

Ring

Four division, multi-angle colour LED/ white LED illumination (electric)
Slit ring (directivity) side green LED illumination (electric)
Telecentric coaxial white LED illumination

External illumination control

Intensity control

PWM control, 100 kHz

Output voltage

12 VDC

Output current

1.6 A (max.)

XY stage

Moving range

300 mm × 150 mm
(motorised)

Withstand load

7 kg

Z stage

Moving range

75 mm (electric)

Power supply

Power voltage

100 to 240 VAC ±10% (50/60 Hz)

Power consumption

150 VA or less

Environmental resistance

Ambient temperature

+10 to 35°C ^*6

Relative humidity

20 to 80% RH (no condensation)

Overvoltage category

ll

Pollution degree

2

Weight

Approx. 34 kg

^*1 In the range of 20 mm × 20 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
^*2 In the range of 5 mm × 5 mm, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position
^*3 In accordance with ISO 10360-7, within the operating ambient temperature range of +23°C ±1°C at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of X/Y stage movement in mm units)
^*4 In accordance with ISO 10360-7, for plane-to-point height, within the operating ambient temperature range of +23°C ±1°C, set to measurement of a target with a maximum height of 50 mm or less, (L = amount of Z stage movement in mm units)
^*5 In-house measurement of a standard target at an operating ambient temperature of +23°C ±1°C
^*6 With an XY-motorised stage travel speed of 80 mm/s: +15 to 35°C